Axis 7100 Installationsanleitung Seite 175

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ADT Model 7100 Semi-Automatic Dicing System Operations Manual
Workpiece Alignment
P/N 97100-9002-000-14 Ver 06/05
6.1-13
To Perform Teach Alignment:
1 Click to display the Programming Workspace.
2 Expand the Recipe assigned to the Workpiece in the Programming
tree, and select any parameter category of that Recipe. The parameter
table for the Recipe is displayed on the right.
3 In the parameter table, select the tab for the first defined angle.
4 Click Teach Align in the Program area of the lower right pane. The
Wizard tab displays the first step to be performed in the procedure.
5 Click Next.
6 Using the Illumination controls, Magnification settings and the Z/T
Axis controls (see
Chapter 2), define optimal illumination, zoom and
focus settings for the Vision System, so these settings can be used later
on for inspection.
7 Click Next. The Pre-Conditions are now completed.
8 Manually Align the Workpiece (see section 6.1.1.1). Click Finish.
9 Define the Cut Position (see section 6.1.1.2). Click Finish, then click
Next.
Note: A confirmation box is displayed if Alignment has already been taught for
the selected angle. The User can decide whether to override the existing
information or to cancel the procedure.
Figure 6-11: Teach Alignment Opening Wizard
Note: If a cut map for the wafer already exists, the system goes to the defined
cut position. To perform the alignment manually click Back.
Note: For APC algorithm the defined cut position is normally the point where
the blade enters the Workpiece. For GPC algorithm, the defined cut position is
anywhere in a center of a street. The cut map is displayed according to the cut
position referred to the chuck center.
Seitenansicht 174
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