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MicroMax Series 670
Single Axis Board Level
Mirror Positioning System
INSTRUCTION MANUAL
Revision 2, December
21,
1998
CAMBRIDGE TECHNOLOGY, INC.
109 Smith Place
Cambridge, MA 02138
U.S.A.
TEL.617-441-0600 FAX.617-497-8800
Seitenansicht 0
1 2 3 4 5 6 ... 67 68

Inhaltsverzeichnis

Seite 1 - Mirror Positioning System

MicroMax™ Series 670 Single Axis Board Level Mirror Positioning System INSTRUCTION MANUAL Revision 2, December 21, 1998 CAMBRIDGE TECHNOLOGY, INC. 109

Seite 2

3.6.4. Command Input Scale Factor Calculation The Command Input scale factor is defmed as the nimiber of volts required at the input of the servo boar

Seite 3

and the desired Command Input Scale Factor = 2:1 or 1.0V/° mechanical Thus, R30 = (Command Input Scale Factor * R29) / (Position Output Scale Factor x

Seite 4 - 1.0. Introduction

The command input offset adjustment potentiometer, Rl, confrols a DC input signal that is added to the normal input signal. RIO confrols the contribut

Seite 5

exceed the capability of the power supply or the board's output amplifier, noise and even instability can result. By controlling the maximum slew

Seite 6

3.7.1. Class 1 Our class 1 servo consists of the following circuits: position differentiator, position amplifier, error integrator, current integrator

Seite 7

The summing amplifier algebraically sums all four of these signals to obtain a composite signal that is sent to the output stage. During startup, a FE

Seite 8

used as another source of velocity information, hence damping. The advantage of this form of damping is its inherent low noise. Its bandwidth can be s

Seite 9

3.8.2. Output Stage Disable The output amplifier is disabled during the power up sequence and recovery from a fault condition. See sections 3.11 and 3

Seite 10

J43-GND#2 (jroimd retum of bypass capacitors. J4.4 - Error out Must have a shorting jumper on W9 1&2 for class 1, W9 2&3 for class 0. Class 0

Seite 11

3.13. Protection Circuits The 670 board has various protection features, some of wiiich have been mentioned above. The primary purpose of this circuit

Seite 12

TABLE OF CONTENTS 1.0. Introduction 2.0. Servo Amplifier Specifications 3.0. Description of Operation 3.1. Overview 3.2. Mechanical Layout 33. Input P

Seite 13

After 2 additional seconds (3 seconds from tum-on), the second stage of U8 resets and the following actions occur: 1. The error integrator is enabled

Seite 14 - Class 1

Do not operate the system under these condition or damage to the scanner may occur. See section 3.2. "Input Power" for a more detailed discu

Seite 15

4.0. Operating Instructions 4.1. Precautions and Warnings As a standard practice, keep the servo channel, scanner, and mirror together as a matched se

Seite 16

4.2. First Time Startup 1. Using the connector kit provided with your system, make the connectors for Jl and J3 as appropriate. Do not attach them to

Seite 17 - ACJC circuit, overposition

11. For digital signals, input a 30 Hz square wave that spans about 5% ofthe field. For analog inputs, put in a square wave of about IV p-p at about 3

Seite 18

5.0. Limited Warranty CTI warrants that its products will be free of defects in material and workmanship for a period of one year from the date of shi

Seite 19

6.0. Appendices 6.1. Tnne-up procedure 6.1.1. Precautions Read the following procedure completely before attempting to retune the system. Serious dama

Seite 20

Once the scanner is tuned up, there is a procedure in section 6.1.9 that explains how to match the responses of two servo axis channels. For best X-Y

Seite 21

6.1.5. Adjusting the Position Output Scale Factor and the AGC Linearity The Position Output Scale Factor is precisely adjusted at Cambridge Technology

Seite 22 - Operating Instructions

2. Tum on the power. 3. The system should perform its normal tum-on process as described in section 4.2. above. 4. Adjust the Command Input Offset Adj

Seite 23

6.0. Appendices 6.1. Tune-up Procedure 6.1.1. Precautions 6.1.2. Overview 6.1.2.1 The Order in which Adjustments should be made 6.1.3. Materials Neede

Seite 24

13. Repeat steps 4. - 12. above until the desired Position Output Scale Factor and Linearity are obtained simultaneously. This is an iterative process

Seite 25 - 5.0. Limited Warranty

8. Measure the distance from P2 to P3. Call this distance L2. 9. The Position Output Scale Factor, POSF, is obtained with the following formula: POSF

Seite 26 - 6.0. Appendices

4. Apply a stable voltage into the Command Input. For digital input systems, send a 16384io output word to the digital input option, and set up W4 for

Seite 27

6.1.7. Closing the Servo Loop The following steps will close the servo loop and make all ofthe servo circuitry active. Again, it is stiessed that the

Seite 28

5. Apply power to the system. The system should perform its normal tum-on sequence and both scanners should center themselves. Check the voltages at T

Seite 29

: CH2 CH1=PositionOut :CH1: CH2=Position In A/ • , ;...;. ^ h ^ iii 2AAmV ^ Ch2 2 1 1 1 . . . ._i_. t T I J. t 1A_ • + t t A/ : : : • • • : : / • • 1

Seite 30

12. Tum R28 until the first overshoot is minimized. See Figure 6. Figure 6. : CH1: •CH2 :... r, 1 ... ••••• ^ i..T...:...:... + CHi=Position Out I C

Seite 31

6.1.7.1.2. Fine Tuning The purpose of this section is to adjust more carefully the "shoulder" ofthe step response. 1. Setup the system by pe

Seite 32

7. Tum R59 CW to eliminate the second overshoot. See Figure 11. This will make the first overshoot much larger. This will be corrected by R28 in the n

Seite 33

Note: Whenever the small angle step response is changed, the large angle step response should be checked in the Slew Rate Limiter Speed Adjustment sec

Seite 34

1.0. Introduction As the complexity and specification requirements of today's optical systems increase, so does the need for high performance, hi

Seite 35 - ...

6.1.7.1.3. Slew Rate Limiter Speed Adjustment Now that the small angle step response is set, the Slew Rate Limiter Speed Adjustment can be set to cont

Seite 36 - .1...:

6. As needed, adjust the Slew Rate Limiter Adjustment trimpot, R78, CW to slow the maximum slew rate of this large angle square wave as needed to keep

Seite 37

6.1.7.2 Class 0 The object of this procedure is to bring the servo gain up slowly while maintaining contiol ofthe scanners at all times. Move all the

Seite 38 - ['"•

7. The scanner should now be responding to the input waveform, but should look very underdamped. Continue to turn R28 CW until the oscillations just d

Seite 39 - ': d

2'MmV VM"SmsExtyid/ i.S8V • CH2 • 1 CHI : / : : : : r^-...:...:... :l ^iii CH1=Position Out CH2=Posttion In •!• 4 T T i + t T T \i : J, t

Seite 40 - ^^^ ^I^

Note the critical damping in figure 24. There is no appreciable overshoot nor undershoot. The step response for this scanner/servo system is about 1.2

Seite 41

6.1.7.2.2. Fine Tuning 1. Setup the system by performing steps 1,4, and 6 from section 6.1.7.2.1. above. 2. Tum on the system power. 3. Adjust the inp

Seite 42

I ... J ... . L ...' ~.. •CH1=Position Out . -; : : i CH2=Posilion in [ • CHr : i . . . : r [ [ CH2 r • [ • HBI 1 fv^''": :•-

Seite 43

6.1.8. Aligning the Mirror This procedure describes how to align the scanner mirror (load) while the servo is still active. Since the servo normally i

Seite 44 - 1 '•

Note: There may be a small offset in position from Mirror Alignment Mode to Normal Mode. This is due to any friction and/or spring in the scanner and

Seite 45 - i..:•...:•

2.0. Servo/Amplifier Specifications MicroMax 670XX Board Level Drive Electronics All angles are in mechanical degree. All specifications apply after a

Seite 46 - '

6.1.9. Matching Two Servo (X and Y) Channels The purpose of this section is to match the dynamic performances of a dual axis X and Y system over all a

Seite 47 - ' : : i :

t • • • • 4- . . . . T ^ • . . ^- ... . • jj • -i-: : :r : : T CHi=Position out, x " : : 1 : : t CH2=Position out, Y ff • 7 • • • GH1 1 • J/

Seite 48

7. Input a full-field signal. See figure 34. While monitoring both channels, slow the faster channel's slew rate limiter trimpot, R78 to make the

Seite 49

6.2. 6740-XX Notch FUter Module 6.2.1 Background Theorv All mechanical systems are subject to vibrations via extemal excitation forces. The degrees of

Seite 50

6.2.2 Notch Filter Tuning Procedure The 6740-XX Notch Filter Module (NFM) is designed to be inserted into J5 of the 670 servo amp. The selection ofthe

Seite 51 - '^^r\T\

e) Adjust the signal generator for about 200mV peak on current. This is a ballpark > figure. The main concern is that the current through the coil

Seite 52 - ... J. ...

load combination, ringing may still occur when tuning the scanner. This is especially true for high Q scanner torsional resonances. The viscous dampin

Seite 53

63. Schematics and Assembly Drawings This section contains the following schematic and assembly drawings. J, 4 5 6 7 8 9 10 670 Schematic D03310 670 A

Seite 55

nnisi TIT U13 W2 H 05 Ih IC4 I rR40n ""^ _ ^i ^^ I irn-g —'^ J6 + iL2Lh LmJ [W] n m mn inr R52 -" fRTOl nam i«o ^1 R42 J3 ^S n TP7

Seite 56

3.0. Description of Operation 3.1. Overview The 670 system's servo electronics are contained on a compact 2.5" x 4.0" multi-layer print

Seite 57

HRSn P9 (MU UST fR^n 5io"' iRion rRsnrRsn g fRion OSS U4 [SS GSED U11 R47 R93 PRsn Rg^CSOiO 'Q3"' ^JL lmo3~l ESQ fRsn EE U7 C

Seite 58

Jl (* PINl COMMAND INPUT CONNECTOR Z63-2.50-2_S5-© Tcm. F4 0 TP3 0 •m* :o) TPl r^l1J6 I II In Goojo 670 REV B J3 Wll 51l OTP2 W5 .rrai tr ik i ® IfflE

Seite 59 - SILKSCREEN D03320

1h«9e drowixgs and specifications or* the property of CAMBRIDGE TECHNaOGY and shoD no) be reproduced, or copied, or used as the basis for the manufocl

Seite 60 - XJUTmi] cEnQia

(6)PLC'S WIRES ONLY NOT ON SHIELDS 1 • • rr-n o a a a a a o a 5 10 FACE VIEW OF PLUG Ihese drawings and spedlicotlons ore the property of CAMBRID

Seite 61 - In Goojo

(6)PLC'S WIRES ONLY NOT ON SHIELDS Theis drowlnfs and speciflcations ore the properly of CAMBRIOGE TECHNOLOGY ond shot not be reproduced, or copi

Seite 62 - SCANNER DRIVE CABLE

Jl CABLE INSUL STRIPPED BACK 3/4" TYP (4)PLC'S SEE CENTER AUX VIEW INDIV WIRE INSUL STRIPPED & TINNED 1/8" TYP (12)PLC'S SEE C

Seite 63 - 68XX DRIVE CABLE

These drawings and specifications are the property of CAMBRIDGE TECHNOLOGY and shall not be reproduced, or copied, or used os the basis for the monufo

Seite 64 - 6010-8L-XXX

(6)PLC'S WIRES ONLY NOT ON SHIELDS 1 n-r aa • • a • a • a a 5 10 FACE VIEW OF PLUG These drawings ond specifications ore Ihe property of CAMBRIDG

Seite 65

(6)PLC"S WIRES ONLY NOT ON SHIELDS These drowings and specifications ore the properly of CAMBRIDGE TECHNaOGY and shell not be reproduced, or copi

Seite 66 - 6010-16-XXX

During system integration, ensure that there is sufficient clearance around and under the board to keep the circuits firom being shorted out, and that

Seite 67

attained the proper level. Proper gauging of wire and power supply sizing should be considered during the design integration ofthe system. **Note: If

Seite 68 - 6010-17L-XXX

be partially eliminated by the R77 trim on the 670 board. This trim is adjusted so that the AGC signal changes minimally through a full angular shaft

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