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Speciﬁ cation subject to change without notice.

Dual-Axis Accelerometer

CAS200 Technical Datasheet

Page 1CAS200-00-0100-132 Rev 3

Features

• Small (10.4 x 6.0 x 2.2mm)

• Excellent bias repeatability over temperature

• Dual-axis MEMS accelerometer in a hermetically

sealed ceramic LCC surface mount package for

temperature and humidity resistance

• Five dynamic range options; ±0.85g, ±2.5g,

±10g, ±30g ±96g

• Analogue and digital (SPI

) outputs for linear

acceleration and temperature

• Wide bandwidth (typically 170Hz)

• Temperature range -40 to +125ºC

• Low power consumption (3mA) from a 3.3V supply

• Integral temperature sensor

• RoHS compliant

Applications

• Aerospace and industrial

• Aircraft AHRS and controls

• Platform stabilisation

• Drilling guidance

• Surveying and mapping

• Land and marine navigation

• Transpor tation

• Inertial measurement units

• Levelling and tilt sensing

1 General Description

Gemini

is a new family of integrated MEMS

accelerometers from Silicon Sensing, providing

high performance dual-axis linear acceleration

measurement in a small surface mounted package.

It comprises a dual-axis MEMS sensing device with

a dedicated control ASIC in a single ceramic LCC

package. Sensor data is output via analogue and

digital (SPI

) interfaces.

The CAS200 series of parts provides two in-plane

axes of linear acceleration sensing and is available in ﬁ ve

different dynamic ranges:

• ±0.85g - CAS211

• ±2.5g - CAS212

• ±10g - CAS213

• ±30g - CAS214

• ±96g - CAS215

CAS200 is supplied as a PCBA surface mountable

standard LCC ceramic packaged device, which

is hermetically sealed providing full environmental

protection.

Precise linear acceleration sensing is achieved by a

Silicon MEMS detector forming an orthogonal pair

of sprung masses. Each mass provides the moving

plate of a variable capacitance formed by an array

of interlaced ‘ﬁ ngers’. This structure also provides

critical damping to prevent resonant gain. Linear

acceleration results in a change of capacitance which

is measured by demodulation of the square wave

excitation.

CAS214 - C

Actual size

www.siliconsensing.com

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Inhaltsverzeichnis

Seite 1 - Technical Datasheet

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Figure 1.2 CAS200 Overall DimensionsFigure 1.1 CAS200 Functional Block Diagram1234 5612141311 10 9 8 710.40 CAS200 Accelerometer Proof Mass CofG

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Seite 17 - Technical Datasheet

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3 Speciﬁ cationUnless otherwise speciﬁ ed the following speciﬁ cationvalues assume Vdd = 3.15 to 3.45V over thetemperature range -40 to +125°C.3.1 D

Seite 22 - CAS200 Technical Datasheet

3.2 Analogue Output Speciﬁ cationParameter CAS211 CAS212 CAS213 CAS214 CAS215 NotesDynamic range ±0.85g ±2.5g ±10g ±30g ±96g –Scale factor 1,150mV/g

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4 Absolute Minimum/Maximum RatingsMinimum MaximumElectrical:Vdd -0.3V +4.0VESD protection – 2kV HBMEnvironmental:Temperature (operating) -40°C +125°C

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